| 23-Oct | 24-Oct | |||
|---|---|---|---|---|
| Time | Room1 | Room2 | Room1 | Room2 |
| 08:30~09:00 | Registration | |||
| 09:00~09:10 | Opening ceremony | |||
| 09:10~09:50 | Invited Lecture I Strategy for Defect Control in Semiconductor Manufacturing in the AI Era Young Jeong Kim (Samsung Electronics Corporate) |
Invited lecture IV The relationship between environmental control indicators and energy saving and consumption reduction of semiconductor cleanroom ventilation system Qunyan Xia (SHENZHEN ESKY Purify Technology Co., Ltd.) |
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| 09:50~10:00 | Break | Break | ||
| 10:00~11:30 | Session I : Indoor environmental quality 1 |
Session II : Semiconductor, FPD and LED |
Session VII : Filtration and separative devices |
Session VIII : Metrology and simulation & Optics & Healthcare and hygiene |
| 11:30~13:00 | Lunch | Closing ceremony (~ 12:00 finish) | ||
| 13:00~13:40 | Invited Lecture II Contamination control technologies on Semiconductor manufacturing processes Yoshimi Shiramizu (Office SHIRAMIZU) |
Technical Tour (13:00 ~ 18:00) |
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| 13:40~14:20 | Invited lecture III Energy Conservation and Micro-Contamination Control for Advanced Semiconductor Facilities Shih-Cheng Hu (National Taipei University of Technology) |
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| 14:20~14:30 | Break | |||
| 14:30~15:45 | Session III : Indoor environmental quality 2 |
Session IV : Cleaning and services |
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| 15:45~15:55 | Break | |||
| 15:55~17:10 | Session V : Safety and environment |
Session VI : Energy system and Management |
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| 17:10~18:20 | Poster Session | |||
| 18:30~20:00 | Gala Dinner | |||
* This program is a draft and may change in the future.
